|
| JAG starts industrial operations of the first on-site Fluorine Gas (F2) generator at an LCD manufacturing fab in Japan (September 19, 2006) |
Today a demand is growing for large-volume supply of cleaning gas for chemical
vapor deposition (CVD) chamber used in semiconductor as well as in TFT
manufacturing process, and there is a strong drive by those industries
to reduce the cleaning costs and improve environmental issues of the cleaning
process linked in particular to Global Warming. For such needs, Fluorine
Gas (F2) can in some circumstances become a very effective alternative
to Nitrogen Trifluoride Gas (NF3), which has been traditionally used as
a cleaning gas.
In this context, Japan Air Gases (JAG) is much honored to have been selected by Toshiba Matsushita Display (TMD) (Ishikawa factory) to supply F2 gas on a long term contract basis from an on-site generator as an alternative to the traditional delivery of NF3 in cylinders. This is the first on-site F2 generator installed at a LCD production facility in Japan. The Fluorine generator is manufactured by BOC Edwards , a division of Linde Group, one of JAG’s parent companies.
On this occasion, Guy Salzgeber, President & CEO of JAG, commented:
“JAG aims at supporting customers by bringing them the latest innovations
in gases and equipments. The first on line F2 generator that we started
up at Ishikawa with the great cooperation of TMD, technical team especially,
is an excellent illustration of what we shall continuously strive to achieve
as a Company for the benefits of our customers”.
|
| ＊＊＊＊＊＊ |
|
Japan Air Gases Ltd. (Headquarter: Tokyo, Capital: 10,509 million yen, President and CEO Guy SALZGEBER) was established in January 2003, by integrating the industrial and medical gas business of Japan Air Liquide Ltd. (established in 1907) and Osaka Sanso Kogyo Ltd. (established 1934) to operates business activities in Japanese market. Parent companies of Japan Air Gases Ltd. are two worldwide leading companies in the industrial and medical gas business, Air Liquide group (France 55%) and *BOC group (U.K. 45%, now merged into German Linde Group as of 5th September 2006). Utilizing parent companies’ global technology and experiences, Japan Air Gases Ltd. is able to supply most advanced solutions to the customers. |
Contact:
Toyoyama Shun, Communication Dept, Japan Air Gases Ltd., TEL：03-3536-2642 |
|
|
