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Various gases are used in the manufacturing process of semiconductors. There are two categories: bulk gases and electronics specialty gases. Bulk gases include nitrogen, oxygen, argon, and hydrogen; electronics specialty gases include material gases such as silane, doping gases such as phosphine, and cleaning gases such as NF3. |
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Purge, carrier, vent, etc.: nitrogen and argon |
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Oxidization: oxygen |
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Film forming, doping and cleaning (in silicon wafer manufacturing etc.):
electronics specialty gases, such as mono silane, phosphine, and NF3. |
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Gas related equipment:
piping, waste gas treatment equipment, gas cabinets, analytical instruments such as micro oxygen analysis meters and dew-point instruments, and liquid material feeders
※Argon and material gases are used also for manufacture of silicon wafers, substrates of silicone semiconductors. |
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